Comment on ``Sputtering Ion Source for Solids''
نویسندگان
چکیده
منابع مشابه
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As extensive experimental studies have shown, under certain conditions, ion bombardment of solid targets induces a random (self-affine) morphology on the ion-eroded surfaces. The rough morphology development is known to cause substantial variations in the sputtering yields. In this article, we present a theoretical model describing the sputter yields from random, self-affine surfaces subject to...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 1964
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1713180